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Edwards Gate Valves for Vacuum Systems

Edwards VAT Gate valves for high and overall leak tightness

Let us help you find the right product from this series

Product features

  • Application-matched vacuum technology → supports stable process pressure and reliable operation
  • Multiple configurations → enables selection around gas load, vacuum level and installation constraints
  • Edwards system integration options → simplify specification of complete vacuum solutions
  • Serviceable construction → supports planned maintenance and lifecycle control
  • Genuine spare-parts support → helps reduce unplanned downtime risk
  • Industrial-duty construction → supports repeatable operation under sustained loads
  • Verified technical documentation → enables model selection against actual process requirements
  • AxFlow product-selection support → helps align pump, controls and accessories with the application
  • Maintenance and service support → helps protect process continuity over the equipment lifecycle
  • Application-specific configuration → helps avoid oversizing, undersizing and unnecessary operating cost

Product description

Gate valves offer a simple but innovative wedge, grease free sealing mechanism, of stainless steel construction and robust design. These valves are especially suited to applications with high levels of process by-product in the gas stream, these are valves with a long service life and reliability in harsh environments.

BGV Manual Gate Valves

BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.

BGV MK3 Pneumatic Gate Valves

The BGV Mk3 pneumatic gate valve works in the same way as the manual gate valve however the pneumatic valve has reed switches which can be used by your control equipment to determine if the valve is open or closed, these also contain LEDs providing a visual display of the valve position. Each BGV Mk3 pneumatic valve is fitted with a 24V d.c. solenoid and pre‑wired plug for direct connection to your Edwards latest generation vacuum pump (iHH, iXL, iXM and GXS). This 15‑way D-sub socket plug offers a single point of connection for both power to the solenoid and activating LEDs from the reed switch position indicators. 15-way “D” socket cable and reed switch position indictors are optionally supplied with BGV valves. However, length of the cable is about 50cm and a longer extension cable is required to connect to a pump or local controller.   In order to connect the BGV Mk3 pneumatic valve to Edwards legacy products the BGV Mk2 TIM interface cable should be used. The functionality of the LEDs is not available on legacy products (iGX, GX or iQ and iH via the iTIM module) as the pumps do not provide the DC 24V power to activate LEDs. However, the basic function of valve positioning indicator works for open and close as no power is required, and it is triggered by the magnetic field.

BGV Stainless Steel Gate Valve with LOTO Safety Feature

BGV LOTO pneumatic gate valves include all the benefits of the standard BGV range, with LOTO safety feature and low power.

BGV LOTO gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV valves are also ideal for other applications where a 1 bar differential at opening is desirable.

The unique Lock‑Out‑Tag‑Out (LOTO) safety mechanism allows personnel to freely work on the vacuum system without fear of the valve inadvertently opening. The valve is physically held closed using a pin to lock the valve shut preventing it from being opened. If there is a requirement for the valve to be locked shut, a lockout hasp can be inserted through the LOTO pin and padlocked.      


Edwards Gate Valves is used for didelio laidumo aukšto ir itin aukšto vakuumo sistemoms. It should be selected around the required vacuum level, gas load and process conditions. The exact configuration depends on the application.
Edwards Gate Valves is based on tiesus didelio skerspjūvio srauto kelias, kuris atidarius sumažina laidumo nuostolius. This technology creates or supports the vacuum required by the process. Performance must be checked against the selected model and operating point.
Check pumping speed, working and ultimate pressure, gas composition, temperature, cooling and connections. Verified product information includes dydžiai, pavaros ir sandarinimo variantai priklauso nuo pasirinktos sklendės. AxFlow can help compare these requirements with the available Edwards configurations.
Maintenance depends on the technology, operating hours and process contamination. Follow Edwards service instructions and use the correct consumables and spare parts. Preventive maintenance helps reduce unplanned downtime.
AxFlow can support product selection for Edwards Gate Valves and help identify the appropriate configuration. AxFlow also provides service and spare-parts support for installed equipment. Contact AxFlow for availability and a quote.
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